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micro resist technology GmbH

Booth number: 4629-49

About us

For more than 20 years, micro resist technology GmbH has been developing, manufacturing and selling innovative photoresists, special polymers and ancillary materials for micro- and nanolithography applications. Due to our highly specialized products we are a trusted supplier of global high-tech markets such as semiconductor industry, MEMS, optoelectronics, nanotechnology and other emerging technologies. Furthermore, micro resist technology has become an esteemed partner for the international and interdisciplinary research community by developing novel resists and materials for next generation lithography applications. Our distinctive competency is to offer our clients tailor-made products and technological solutions that meet individual technical requirements. In addition, micro resist technology is the European distributor of selected products groups from DOW Electronic Materials (USA), MicroChem Corp. (USA), and DuPont (USA).

Products and services

We will inform about our innovative photoresists, special polymers and ancillary materials for micro- and nanolithography applications as well as UV-curable hybrid polymers suitable for the manufacture of micro-optics and waveguide applications.

micro lens array

micro lens array

Manufacture of micro lens array via inkjet-printing of UV-curable hybrid polymers.


micro resist technology GmbH
Koepenicker Str. 325
12555 Berlin

Phone: +49 30 641670-100
Fax: +49 30 641670-200

Arne Schleunitz
Head of Technology Management
Phone: +49 30 641670-100

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