This brand new micropositioning stage DSP 50 reaches an positioning accuracy of 1 nm in closed loop operation over a travel range of 10 mm. It is driven by 8 piezo inertial drives which are controlled phase shifted. This offers you both a very high uniformity of the velocity even at very low velocities and very high driving forces (up to 15 N) in closed and open loop operation. The outer dimensions of the DSP 50 are 50 x 50 x 16 mm.
Exhibitor: mechOnics ag